Semiconductor Cleanroom Project | Turnkey Engineering & Design Solutions

Semiconductor Cleanroom Project — Typical Engineering Solution

The following is a typical engineering solution for a semiconductor cleanroom project, designed to showcase Farclean’s design capabilities and engineering expertise. All project parameters are illustrative and can be customized according to client requirements.

Project Overview

• Industry Focus: Semiconductor / IC Manufacturing
• Typical Cleanliness Level: ISO 14644 Class 100–1000
• Illustrative Area: 2,000㎡ (scalable according to client needs)
• Core Systems: HVAC, FFU, HEPA/ULPA filters, air shower, pass box, cleanroom panels, monitoring system
• Scope: Design → Materials Selection → Layout Planning → Engineering Simulation → Commissioning Guidance

Design Highlights of This Typical Semiconductor Cleanroom

1. ISO 14644 Airflow & Contamination Control

The design demonstrates a stable laminar airflow distribution to minimize turbulence and maintain low particle levels in critical areas. Key features include:

• ULPA / H14 HEPA filtration
• Intelligent pressure differential control
• Optimized return-air channels for rapid particle removal

2. Temperature & Humidity Stability

To meet lithography and deposition process requirements, the typical solution can achieve:

• Temperature control ±0.2°C
• Humidity control 40%–50% RH
• Localized micro-environment control for critical coating zones

3. Electrostatic & Molecular Contamination Control

• ESD flooring and anti-static construction materials
• Active molecular contamination (AMC) filtration
• Control of organic vapors for stable chip manufacturing processes

4. Modular Hardwall & Softwall Combination

The hybrid structure balances high cleanliness with flexible equipment layout. Modular panels and reinforced aluminum profiles ensure long-term durability.

Installed Systems & Equipment (Illustrative)

• Multi-zone FFU layout for wafer, coating, exposure, and etching zones
• HEPA / ULPA high-efficiency filtration system
• Air showers & pass boxes for safe personnel/material transfer
• Environmental monitoring system for particles, pressure, temperature, and humidity
• High-static pressure HVAC system supporting 24/7 operation

Why Choose Farclean for Semiconductor Cleanroom Projects

• Over 15 years of cleanroom engineering experience in semiconductor industry
• Full turnkey services: design → modular construction → system integration → commissioning guidance
• Customizable solutions to match process, cleanliness, and space requirements
• Documentation and compliance support for global clients